Type Of Media：国際学会
Publication/Magazine/Media：38th IEEE International Conference on Microelectronic Test Structures (ICMTS)
Author：Ken Uchida et al.
Evaluation, Operando Analysis, and Thermal Modeling of Nanosheet Gas Sensors
Summary:
Metal nanosheet and graphene gas sensors offer highly sensitive, low-power platforms that can be readily integrated into microelectronic test element groups (TEGs). Their ultrathin geometry enhances chemiresistive modulation, enabling quantitative modeling and operando analysis of surface reactions. Recent advances in self-heating allow voltage-programmable operation with minimal power. This work presents nanosheet fabrication, adsorption–desorption modeling, self-heating sensor operation, operando surface spectroscopy, thermal-aware structural optimization, and nanoscale temperature mapping. Together these methods establish a unified framework for evaluating and designing Pt-, PtRh-, Au-, and graphene-based low-power nanosheet sensors for IoT society.
https://ieeexplore.ieee.org/abstract/document/11471734
